8 results
Effects of Bonding Process Parameters on Wafer-to-Wafer Alignment Accuracy in Benzocyclobutene (BCB) Dielectric Wafer Bonding
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B10.8
- Print publication:
- 2005
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Evaluation of Thin Dielectric-Glue Wafer-Bonding for Three Dimensional Integrated Circuit-Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F6.16
- Print publication:
- 2004
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Fundamental Limits for 3D Wafer-to-Wafer Alignment Accuracy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F6.10
- Print publication:
- 2004
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Planarization Issues in Wafer-Level Three-Dimensional (3D) Integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K7.7
- Print publication:
- 2004
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Dielectric GlueWafer Bonding For 3D ICs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E5.8
- Print publication:
- 2003
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Wafer Thinning for Monolithic 3D Integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E5.7
- Print publication:
- 2003
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Modeling of Ionized Magnetron Sputtering of Copper
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- Journal:
- MRS Online Proceedings Library Archive / Volume 616 / 2000
- Published online by Cambridge University Press:
- 10 February 2011, 147
- Print publication:
- 2000
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Morphology of Ag Islands Grown on GaAs (110) at Low Coverage: Monte Carlo Simulations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 399 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 103
- Print publication:
- 1995
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